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  3. Linear position sensors
  4. Capacitive position sensors
  5. ILR PROBES Capacitive Position Sensor

ILR PROBES Capacitive Position Sensor

The cable is low-noise highly flexible silicone integral to the ILR probe and exits the probe radially


Sample Applications for ILR probes

  • Microscope focus
  • Lens alignment
  • Part profiling
  • Part tilt
  • Semiconductor wafer thickness
  • Piezo stage displacement
  • Vibration measurement
  • Computer disk run out and thickness
  • Brake rotor warp and thickness
  • Sheet metal thickness
  • Photovoltaic wafers

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Technical Specifications

Specification Value
Accuracy 0.05% FS
Cable length 2.44 m to 15.2 m
Measurement range 0.025 to 5.08mm
Pressure rating Standard 200 psig

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  • Measuring range: 0 to 12,5 mm
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